ASTM.org\u306eASTM E595\u306b\u79fb\u52d5\u3059\u308b<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"\u610f\u7fa9\u3068\u7528\u9014<\/p>\n
5.1 \u3053\u306e\u8a66\u9a13\u6cd5\u306f\u3001\u614e\u91cd\u306b\u7ba1\u7406\u3055\u308c\u305f\u6761\u4ef6\u4e0b\u3067\u3001\u771f\u7a7a\u4e0b\u3067\u6e29\u5ea6 125\u2103\u306b\u3055\u3089\u3055\u308c\u305f\u8a66\u9a13\u7247\u306e\u8cea\u91cf\u5909\u5316\u3068\u3001\u8a66\u9a13\u7247\u3092\u96e2\u308c\u6e29\u5ea6 25\u2103\u306e\u30b3\u30ec\u30af\u30bf\u30fc\u4e0a\u3067\u51dd\u7e2e\u3059\u308b\u751f\u6210\u7269\u306e\u8cea\u91cf\u3092\u8a55\u4fa1\u3059\u308b\u3002<\/p>\n
5.2 24\u6642\u9593\u306e\u8a66\u9a13\u6642\u9593\u306f\u3001\u9577\u5e74\u306e\u904b\u8ee2\u306b\u3088\u308b\u5b9f\u969b\u306e\u30a2\u30a6\u30c8\u30ac\u30b9\u3092\u8868\u3059\u3082\u306e\u3067\u306f\u306a\u3044\u305f\u3081\u3001\u4f7f\u7528\u4e2d\u306e\u5b9f\u969b\u306e\u30a2\u30a6\u30c8\u30ac\u30b9\u3092\u4e88\u6e2c\u3059\u308b\u610f\u56f3\u306f\u306a\u304f\u3001\u6750\u6599\u306e\u6bd4\u8f03\u3092\u53ef\u80fd\u306b\u3059\u308b\u305f\u3081\u306b\u3001\u3088\u308a\u9ad8\u3044\u8a66\u9a13\u6e29\u5ea6\u3068\u77ed\u3044\u6642\u9593\u3092\u9078\u629e\u3057\u305f\u3002\u8a66\u9a13\u6e29\u5ea6125\u2103\u306f\u3001\u4f7f\u7528\u6642\u306b\u4e88\u60f3\u3055\u308c\u308b\u52d5\u4f5c\u6e29\u5ea6\u3092\u5927\u5e45\u306b\u4e0a\u56de\u308b\u3068\u4eee\u5b9a\u3057\u307e\u3057\u305f\u3002\u4e88\u60f3\u3055\u308c\u308b\u4f7f\u7528\u6e29\u5ea6\u304c65\uff5e70\u2103\u3092\u8d85\u3048\u308b\u5834\u5408\u306f\u3001\u8a66\u9a13\u6e29\u5ea6\u3092\u4e0a\u3052\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002TML\u3068CVCM\u306e\u6750\u6599\u6bd4\u8f03\u3092\u884c\u3046\u305f\u3081\u306b\u3001\u8a66\u9a13\u6e29\u5ea6\u306f\u4e88\u60f3\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6\u3088\u308a\u5c11\u306a\u304f\u3068\u308230\u2103\u9ad8\u304f\u3059\u308b\u3053\u3068\u304c\u63a8\u5968\u3055\u308c\u307e\u3059\u3002<\/p>\n
5.3 \u6750\u6599\u306e\u30a2\u30a6\u30c8\u30ac\u30b9\u7279\u6027\u306e\u6bd4\u8f03\u306f\u3001125\u2103\u306e\u8a66\u6599\u6e29\u5ea6\u306825\u2103\u306e\u30b3\u30ec\u30af\u30bf\u30fc\u6e29\u5ea6\u3067\u306e\u307f\u6709\u52b9\u3067\u3042\u308b\u3002\u4ed6\u306e\u6e29\u5ea6\u3067\u8a66\u9a13\u3055\u308c\u305f\u8a66\u6599\u306f\u3001\u305d\u306e\u540c\u3058\u6e29\u5ea6\u3067\u8a66\u9a13\u3055\u308c\u305f\u4ed6\u306e\u6750\u6599\u3068\u306e\u307f\u6bd4\u8f03\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p>\n
5.4 \u53ce\u96c6\u3055\u308c\u305f\u63ee\u767a\u6027\u51dd\u7e2e\u6027\u7269\u8cea\u306e\u6e2c\u5b9a\u5024\u3082\u6bd4\u8f03\u53ef\u80fd\u3067\u3042\u308a\u300125\u2103\u3067\u540c\u69d8\u306e\u30b3\u30ec\u30af\u30bf\u30fc\u5f62\u72b6\u304a\u3088\u3073\u8868\u9762\u306b\u5bfe\u3057\u3066\u306e\u307f\u6709\u52b9\u3067\u3042\u308b\u3002\u30b5\u30f3\u30d7\u30eb\u306f\u3001\u3053\u306e\u8a66\u9a13\u6280\u8853\u306b\u3088\u308a\u3001\u30b5\u30f3\u30d7\u30eb\u6e29\u5ea650\uff5e400\u2103\u3001\u30b3\u30ec\u30af\u30bf\u30fc\u6e29\u5ea61\uff5e30\u2103\u3067\u8a66\u9a13\u3055\u308c\u3066\u3044\u308b\u3002\u975e\u6a19\u6e96\u7684\u306a\u6761\u4ef6\u3067\u63a1\u53d6\u3055\u308c\u305f\u30c7\u30fc\u30bf\u306f\u660e\u78ba\u306b\u8b58\u5225\u3055\u308c\u306a\u3051\u308c\u3070\u306a\u3089\u305a\u3001125\u2103\u306e\u30b5\u30f3\u30d7\u30eb\u6e29\u5ea6\u306825\u2103\u306e\u30b3\u30ec\u30af\u30bf\u30fc\u6e29\u5ea6\u3067\u30c6\u30b9\u30c8\u3055\u308c\u305f\u30b5\u30f3\u30d7\u30eb\u3068\u6bd4\u8f03\u3057\u3066\u306f\u306a\u3089\u306a\u3044\u3002<\/p>\n
5.5 \u3053\u306e\u8a66\u9a13\u6cd5\u306b\u304a\u3051\u308b\u5b87\u5b99\u306e\u771f\u7a7a\u306e\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u60d1\u661f\u9593\u98db\u884c\u3067\u906d\u9047\u3059\u308b\u3088\u3046\u306a\u4f4e\u3044\u5727\u529b\uff08\u4f8b\u3048\u3070\u300110-12 Pa\uff0810-14 torr\uff09\uff09\u3067\u3042\u308b\u3053\u3068\u3092\u8981\u6c42\u3057\u3066\u3044\u306a\u3044\u3002\u5727\u529b\u306f\u3001\u6c17\u4f53\u5206\u5b50\u306e\u5e73\u5747\u81ea\u7531\u884c\u7a0b\u304c\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u5bf8\u6cd5\u306b\u6bd4\u3079\u3066\u9577\u304f\u306a\u308b\u7a0b\u5ea6\u306b\u4f4e\u3051\u308c\u3070\u5341\u5206\u3067\u3042\u308b\u3002<\/p>\n
5.6 \u307b\u3068\u3093\u3069\u306e\u7528\u9014\u306b\u304a\u3044\u3066\u3001\u4f7f\u7528\u6642\u306e\u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6\u306f50\uff5e60\u2103\u3092\u8d85\u3048\u306a\u3044\u3068\u60f3\u5b9a\u3055\u308c\u3066\u3044\u308b\u305f\u3081\u3001\u3053\u306e\u3088\u3046\u306a\u6750\u6599\u306e\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u65b9\u6cd5\u306f\u4fdd\u5b88\u7684\u306a\u3082\u306e\u3067\u3042\u308b\u3068\u8003\u3048\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u4f7f\u7528\u6e29\u5ea6\u3067\u8a31\u5bb9\u3067\u304d\u308b\u7279\u6027\u3092\u6301\u3061\u306a\u304c\u3089\u3001\u8a66\u9a13\u6e29\u5ea6\u3067\u3042\u308b125\u2103\u3067\u306f\u305d\u306e\u7279\u6027\u304c\u6e80\u8db3\u3067\u304d\u306a\u3044\u305f\u3081\u306b\u6392\u9664\u3055\u308c\u308b\u6750\u6599\u304c\u3044\u304f\u3064\u304b\u3042\u308b\u53ef\u80fd\u6027\u304c\u3042\u308a\u307e\u3059\u3002\u307e\u305f\u300125 \u00b0C\u4ee5\u4e0b\u3067\u3057\u304b\u51dd\u7e2e\u3057\u306a\u3044\u6750\u6599\u306f\u691c\u51fa\u3055\u308c\u307e\u305b\u3093\u3002\u30e6\u30fc\u30b6\u30fc\u306f\u3001\u7279\u5b9a\u306e\u7528\u9014\u306e\u6750\u6599\u3092\u8a8d\u5b9a\u3059\u308b\u305f\u3081\u306b\u3001\u8ffd\u52a0\u306e\u8a66\u9a13\u3092\u6307\u5b9a\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p>\n
5.7 TML\u3068WVR\u306e\u6c7a\u5b9a\u306f\u3001\u6c34\u84b8\u6c17\u3092\u7372\u5f97\u307e\u305f\u306f\u55aa\u5931\u3059\u308b\u6750\u6599\u306e\u5bb9\u91cf\u306b\u3088\u3063\u3066\u5f71\u97ff\u3092\u53d7\u3051\u308b\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u8a08\u91cf\u306f23\u2103\u304a\u3088\u3073\u76f8\u5bfe\u6e7f\u5ea650\uff05\u306e\u7ba1\u7406\u3055\u308c\u305f\u6761\u4ef6\u4e0b\u3067\u5b9f\u65bd\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002<\/p>\n
5.8 \u3042\u308b\u3044\u306f\u300124 \u6642\u9593\u306e\u6e29\u6e7f\u5ea6\u8abf\u6574\u4e2d\u306b\u3001\u3059\u3079\u3066\u306e\u8a66\u6599\u3092\u958b\u653e\u578b\u30ac\u30e9\u30b9\u30d0\u30a4\u30a2\u30eb\u306b\u5165\u308c\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u30d0\u30a4\u30a2\u30eb\u306f\u3001\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u304b\u3089\u53d6\u308a\u51fa\u3059\u524d\u306b\u30ad\u30e3\u30c3\u30d7\u3092\u3057\u3066\u304a\u304b\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u5236\u5fa1\u3055\u308c\u3066\u3044\u306a\u3044\u6e7f\u5ea6\u74b0\u5883\u306b\u3055\u3089\u3055\u308c\u3066\u3044\u308b\u9593\u306e\u6c34\u84b8\u6c17\u306e\u640d\u5931\u3084\u5438\u53ce\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u305f\u3081\u3001\u5404\u8a66\u9a13\u7247\u306f\u30d0\u30a4\u30a2\u30eb\u958b\u5c01\u5f8c2\u5206\u4ee5\u5185\u306b\u91cd\u91cf\u3092\u6e2c\u5b9a\u3057\u306a\u3051\u308c\u3070\u306a\u3089\u306a\u3044\u3002\u3053\u306e\u6642\u70b9\u3067\u306f\u6e7f\u5ea6\u7ba1\u7406\u306f\u5fc5\u8981\u3042\u308a\u307e\u305b\u3093\u304c\u3001\u8a08\u91cf\u6642\u306e\u6e29\u5ea6\u306f24\u6642\u9593\u4fdd\u5b58\u8a66\u9a13\u3068\u540c\u305823\u2103\u306b\u7ba1\u7406\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n
\u9069\u7528\u7bc4\u56f2<\/p>\n
1.1 \u3053\u306e\u8a66\u9a13\u6cd5\u306f\u3001\u771f\u7a7a\u74b0\u5883\u306b\u3055\u3089\u3055\u308c\u305f\u3068\u304d\u306e\u6750\u6599\u306e\u63ee\u767a\u6027\u542b\u6709\u91cf\u3092\u6e2c\u5b9a\u3059\u308b\u305f\u3081\u306e\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u6280\u8853\u3092\u5bfe\u8c61\u3068\u3059\u308b\u3002\u5168\u8cea\u91cf\u640d\u5931\uff08TML\uff09\u3068\u56de\u53ce\u3055\u308c\u305f\u63ee\u767a\u6027\u51dd\u7e2e\u7269\u8cea\uff08CVCM\uff09\u306e 2 \u3064\u306e\u30d1\u30e9\u30e1\u30fc\u30bf\u304c\u6e2c\u5b9a\u3055\u308c\u308b\u3002\u307e\u305f\u3001TML \u3068 CVCM \u306b\u5fc5\u8981\u306a\u66b4\u9732\u3068\u6e2c\u5b9a\u304c\u5b8c\u4e86\u3057\u305f\u5f8c\u3001\u8ffd\u52a0\u30d1\u30e9\u30e1\u30fc\u30bf\u3067\u3042\u308b\u6c34\u84b8\u6c17\u518d\u4e0a\u6607\u91cf\uff08WVR\uff09\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002<\/p>\n
1.2 \u3053\u306e\u8a66\u9a13\u6cd5\u306f\u30017\u00d710-3Pa\uff085\u00d710-5torr\uff09\u672a\u6e80\u3067125\u2103\u306b24\u6642\u9593\u3055\u3089\u3055\u308c\u305f\u6750\u6599\u306e\u8cea\u91cf\u640d\u5931\u3092\u8a55\u4fa1\u3059\u308b\u305f\u3081\u306e\u8a66\u9a13\u88c5\u7f6e\u304a\u3088\u3073\u95a2\u9023\u64cd\u4f5c\u624b\u9806\u306b\u3064\u3044\u3066\u8aac\u660e\u3059\u308b\u3002\u5f8c\u8005\u306f\u300125\u2103\u306e\u6e29\u5ea6\u3067\u96c6\u5875\u6a5f\u4e0a\u3067\u51dd\u7e2e\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3082\u306e\u3068\u3057\u3066\u3001\u672c\u660e\u7d30\u66f8\u3067\u306f\u7279\u5fb4\u3065\u3051\u3089\u308c\u308b\u3002<\/p>\n
\u6ce81\uff1a\u7279\u306b\u65ad\u308a\u306e\u306a\u3044\u9650\u308a\u300125\u2103\u3068125\u2103\u306e\u8a31\u5bb9\u5dee\u306f\u00b11\u2103\u300123\u2103\u306e\u8a31\u5bb9\u5dee\u306f\u00b12\u2103\u3067\u3042\u308b\u3002\u76f8\u5bfe\u6e7f\u5ea6\u306e\u8a31\u5bb9\u5dee\u306f\u00b15\uff05\u3067\u3042\u308b\u3002<\/p>\n
1.3 \u591a\u304f\u306e\u7a2e\u985e\u306e\u6709\u6a5f\u6750\u6599\u3001\u9ad8\u5206\u5b50\u6750\u6599\u3001\u7121\u6a5f\u6750\u6599\u3092\u8a66\u9a13\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002\u30dd\u30ea\u30de\u30fc\u30dd\u30c3\u30c6\u30a3\u30f3\u30b0\u30b3\u30f3\u30d1\u30a6\u30f3\u30c9\u3001\u767a\u6ce1\u4f53\u3001\u30a8\u30e9\u30b9\u30c8\u30de\u30fc\u3001\u30d5\u30a3\u30eb\u30e0\u3001\u30c6\u30fc\u30d7\u3001\u7d76\u7e01\u4f53\u3001\u53ce\u7e2e\u30c1\u30e5\u30fc\u30d6\u3001\u63a5\u7740\u5264\u3001\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3001\u5e03\u5730\u3001\u30bf\u30a4\u30b3\u30fc\u30c9\u3001\u6f64\u6ed1\u5264\u306a\u3069\u3067\u3059\u3002\u6750\u6599\u306f\u3001\u300c\u53d7\u3051\u53d6\u3063\u305f\u307e\u307e\u306e\u72b6\u614b\u300d\u3067\u8a66\u9a13\u3059\u308b\u3053\u3068\u3082\u3001\u69d8\u3005\u306a\u786c\u5316\u4ed5\u69d8\u306b\u3088\u3063\u3066\u8a66\u9a13\u7528\u306b\u6e96\u5099\u3059\u308b\u3053\u3068\u3082\u3067\u304d\u308b\u3002<\/p>\n
1.4 \u3053\u306e\u8a66\u9a13\u6cd5\u306f\u3001\u4e3b\u306b\u6750\u6599\u306e\u30b9\u30af\u30ea\u30fc\u30cb\u30f3\u30b0\u6280\u8853\u3067\u3042\u308a\u3001\u69cb\u6210\u3001\u6e29\u5ea6\u3001\u304a\u3088\u3073\u6750\u6599\u51e6\u7406\u306e\u9055\u3044\u304b\u3089\u3001\u30b7\u30b9\u30c6\u30e0\u307e\u305f\u306f\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u306e\u5b9f\u969b\u306e\u6c5a\u67d3\u3092\u8a08\u7b97\u3059\u308b\u305f\u3081\u306b\u5fc5\u305a\u3057\u3082\u6709\u52b9\u3067\u306f\u306a\u3044\u3002<\/p>\n
1.5 \u6750\u6599\u306e\u53d7\u3051\u5165\u308c\u3068\u62d2\u5426\u306b\u4f7f\u7528\u3055\u308c\u308b\u57fa\u6e96\u306f\u3001\u30e6\u30fc\u30b6\u30fc\u306b\u3088\u3063\u3066\u6c7a\u5b9a\u3055\u308c\u3001\u7279\u5b9a\u306e\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3068\u30b7\u30b9\u30c6\u30e0\u8981\u4ef6\u306b\u57fa\u3065\u3044 \u3066\u3044\u308b\u3082\u306e\u3068\u3059\u308b\u3002\u6b74\u53f2\u7684\u306b\u3001TML1.00 %\u53ca\u3073CVCM0.10 %\u306f\u3001\u5b87\u5b99\u6a5f\u7528\u6750\u6599\u306e\u4e0d\u5408\u683c\u5224\u5b9a\u57fa\u6e96\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u3066\u304d \u307e\u3057\u305f\u3002<\/p>\n
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